A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU Leuven. ...
Adrian Cansell loading a 100mm silicon wafer into a 200 kV ion implanter. University of Surrey Ion Beam Centre, Author provided Lord Rutherford was the first to explain, in 1911, that atoms are made ...